Development of a novel micromachined magnetostatic membrane actuator

Author

Khoo, M. ; Chang Liu

Author_Institution

Microelectron. Lab., Illinois Univ., Urbana, IL, USA

fYear

2000

fDate

19-21 June 2000

Firstpage

109

Lastpage

110

Abstract

We present work on the development of a new, micromachined magnetostatic membrane actuator. The unique aspects of this actuator lie in its design and fabrication, and in its operational simplicity. A novel micromachining process was developed for embedding micro-sized pieces of a ferromagnetic material (Permalloy, Ni/sub 80/Fe/sub 20/) into a thin, very flexible, silicone elastomer membrane (PDMS, polydimethyl siloxane). This unique design results in a membrane actuator capable of generating significantly larger membrane displacements than that of typical membrane microactuators.

Keywords

Permalloy; elastomers; ferromagnetic materials; membranes; microactuators; micromachining; Ni/sub 80/Fe/sub 20/; Ni/sub 80/Fe/sub 20/ embedded pieces; actuator design; actuator fabrication; embedded Permalloy ferromagnetic material pieces; flexible silicone elastomer membrane; membrane actuator; membrane displacements; membrane microactuators; micromachined magnetostatic membrane actuator; micromachining process; operational simplicity; polydimethyl siloxane membrane; Actuators; Biomembranes; Fabrication; Magnetic fields; Magnetic sensors; Magnetostatics; Microactuators; Microfluidics; Micropumps; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2000. Conference Digest. 58th DRC

Conference_Location

Denver, CO, USA

Print_ISBN

0-7803-6472-4

Type

conf

DOI

10.1109/DRC.2000.877110

Filename

877110