Title :
Determination of parameters of thin semiconductor layers by means of one-dimensional microwave photonic crystals
Author :
Ponomarev, D.V. ; Nikitov, S.A. ; Usanov, D.A. ; Skripal, A.V. ; Postelga, A.E.
Author_Institution :
Solid State Phys. Dept., Saratov State Univ. named after N.G. Chernyshevsky, Saratov, Russia
Abstract :
The possibility to simultaneously determine the thickness and the electrical conductivity of thin semiconductor layer, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.
Keywords :
electrical conductivity measurement; inverse problems; microwave photonics; optical variables measurement; photonic crystals; semiconductor thin films; thickness measurement; 1D microwave photonic crystal; electrical conductivity measurement; inverse problem solving; reflection measurement; thickness measurement; thin semiconductor layer; transmission spectra measurement; Decision support systems; Hafnium; Microwave photonic crystal; electrical conductivity; measurement; semiconductor layer; thickness;
Conference_Titel :
Microwave Radar and Wireless Communications (MIKON), 2012 19th International Conference on
Conference_Location :
Warsaw
Print_ISBN :
978-1-4577-1435-1
DOI :
10.1109/MIKON.2012.6233624
