MEMS scanner based handheld fluorescent hyperspectral imaging system

We demonstrate a hand-held hyperspectral fluorescence imaging microsystem, where multiple narrow-band spectral images can be captured simultaneously across the area under examination. In addition to the advantages of combined functional imaging and spectroscopy, the system demonstrates the fast scanning over large field-of-view (FOV) provided by a CMOS compatible 2-axis microelectromechanical system (MEMS) scanning mirror in the probe. Spectral information from 15 wavelengths were acquired simultaneously by using a multichannel photomultiplier tube (PMT), rendering a spectral resolution of 20nm. FOV up to 0.8 cm × 0.5 cm with 100μm lateral resolution was acquired, with a hyperspectral imaging rendering rate of 4 seconds per frame.