Title :
Integrated micro-mirrors for compact routing of optical polymer waveguides
Author :
Lamprecht, Tobias ; Beyeler, René ; Dangel, Roger ; Horst, Folkert ; Jubin, Daniel ; Meier, Norbert ; Weiss, Jonas ; Offrein, Bert Jan
Author_Institution :
Zurich Res. Lab., IBM Res. GmbH, Ruschlikon, Switzerland
Abstract :
We report on micro-mirrors integrated in optical polymer waveguides. The mirrors are fabricated prior to the waveguide core definition step and are based on a selective wet-chemical metallization process.
Keywords :
micromirrors; optical polymers; optical waveguides; micro-mirrors; optical polymer waveguides routing; selective wet-chemical metallization; Bandwidth; Electromagnetic waveguides; Mirrors; Optical crosstalk; Optical materials; Optical polymers; Optical surface waves; Optical waveguides; Packaging; Routing;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343491
