Title :
Technology and characteristics of microhumidity sensors
Author :
Krutovertsev, S.A. ; Tarasova, A.E. ; Krutovertseva, L.S. ; Chuprin, M.V. ; Ivanova, O.M. ; Sazhinev, Yu.S.
Author_Institution :
JSC Ecological Sensors & Syst., Moscow, Russia
Abstract :
Operation principle of the microhumidity sensors is based on a relationship between a capacity of doped silica film and an amount of humidity that sorbed by it. Characteristics of the films that were produced by a hydrolytic polycondensation from tetraethylorthosilicate based solutions were studied. Influence of technological factors on formation and sensitivity of the films was determined. High sensitivity enables to use the sensors to measure humidity content for especially pure gases, used in microelectronic technology, active gases at humidity content up to 193 K by dew point and organic solvents.
Keywords :
humidity measurement; humidity sensors; microsensors; silicon; doped silica film; humidity content measurement; hydrolytic polycondensation; microelectronic technology; microhumidity sensors; organic solvents; tetraethylorthosilicate; Additives; Films; Humidity; Surface treatment; Temperature measurement; Temperature sensors; Silica; humidity sensor; sol-gel; thin film;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969782
