DocumentCode
2539702
Title
A new platform for assembly of carbon nanotubes on nano sensors by utilizing optically-induced dielectrophoresis and dielectrophoresis
Author
Wu, Pei-Fang ; Lee, Gwo-Bin
Author_Institution
Dept. of Eng. Sci., Nat. Cheng Kung Univ., Tainan, Taiwan
fYear
2011
fDate
5-9 June 2011
Firstpage
633
Lastpage
636
Abstract
This study reports a new platform capable of assembling carbon nanotubes (CNTs) between electrodes to form CNT-based nano sensors based on the combination of optically-induced dielectrophoresis (ODEP) force and dielectrophoresis (DEP) force. Indium-tin-oxide (ITO) electrodes and amorphous silicon (a-Si) layer were patterned and then used to assemble CNTs. By utilizing moving light patterns, the CNTs could be collected to the central area between two ITO electrodes. The CNTs with different concentrations can be collected to form CNT-based nano sensors with different widths of sensing elements successfully. Preliminary results for CNTs immobilization were also demonstrated by exposing them to an ultraviolet (UV) light source.
Keywords
carbon nanotubes; electrophoresis; nanosensors; C; CNT-based nanosensors; ITO; ODEP force; UV light source; carbon nanotube based sensors; electrodes; optically-induced dielectrophoresis force; ultraviolet light source; Carbon nanotubes; Dielectrophoresis; Electrodes; Force; Indium tin oxide; Optical sensors; Carbon nanotubes; ITO electrodes; dielectrophoresis; optically-induced dielectrophoresis;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969786
Filename
5969786
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