Title :
Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures
Author :
De Volder, M. ; Tawfick, S. ; Park, S.J. ; Copic, D. ; Hart, A.J.
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Capillary forming of carbon nanotubes (CNTs) enables the fabrication of unique 3D microstructures over large areas. In this paper we focus on the simulation as well as on the integration of these structures in MEMS devices. We developed finite element models (FEM) that enables qualitative prediction of shape transformations caused by capillary forming; and show how capillary formed CNT structured can be integrated with conventional lithographic processing for patterning of polymers and metals in concert with CNTs.
Keywords :
carbon nanotubes; finite element analysis; self-assembly; 3D microstructures; capillary forming; finite element models; programmable transformation; vertically aligned carbon nanotubes; Carbon nanotubes; Electrodes; Fabrication; Finite element methods; Microstructure; Predictive models; Three dimensional displays; Capillary; Carbon nanotube (CNT); Self-Assembly; Three-dimensional;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969791
