DocumentCode :
2540209
Title :
Structural and thermoelectric characterization of individual single crystalline nanowires
Author :
Wang, Z. ; Kroener, M. ; Woias, P.
Author_Institution :
Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
1867
Lastpage :
1870
Abstract :
We demonstrate the fabrication and initial testing of a novel micromachined Thermoelectric Nanowire Characterization Platform (TNCP) which will be applied to measure the thermoelectric properties of a single thermoelectric nanowire. The assembly of the nanowire onto the TNCP is conducted by means of dielectrophoresis (DEP) in combination with a controlled deposition and evaporation of a liquid sample containing nanowires. This paper presents the design of the TNCP with integrated sensors and DEP electrodes, methods of surface modification for a controlled deposition and evaporation and a successful nanowire deposition.
Keywords :
electrophoresis; micromachining; nanowires; thermoelectricity; DEP electrodes; dielectrophoresis; integrated sensors; micromachined thermoelectric nanowire characterization platform; single crystalline nanowires; single thermoelectric nanowire; surface modification; thermoelectric properties; Assembly; Dielectrophoresis; Electric fields; Force; Nanowires; Silicon; Surface treatment; TNCP; dielectrophoresis; thermoelectric nanowires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969817
Filename :
5969817
Link To Document :
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