DocumentCode
2540209
Title
Structural and thermoelectric characterization of individual single crystalline nanowires
Author
Wang, Z. ; Kroener, M. ; Woias, P.
Author_Institution
Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany
fYear
2011
fDate
5-9 June 2011
Firstpage
1867
Lastpage
1870
Abstract
We demonstrate the fabrication and initial testing of a novel micromachined Thermoelectric Nanowire Characterization Platform (TNCP) which will be applied to measure the thermoelectric properties of a single thermoelectric nanowire. The assembly of the nanowire onto the TNCP is conducted by means of dielectrophoresis (DEP) in combination with a controlled deposition and evaporation of a liquid sample containing nanowires. This paper presents the design of the TNCP with integrated sensors and DEP electrodes, methods of surface modification for a controlled deposition and evaporation and a successful nanowire deposition.
Keywords
electrophoresis; micromachining; nanowires; thermoelectricity; DEP electrodes; dielectrophoresis; integrated sensors; micromachined thermoelectric nanowire characterization platform; single crystalline nanowires; single thermoelectric nanowire; surface modification; thermoelectric properties; Assembly; Dielectrophoresis; Electric fields; Force; Nanowires; Silicon; Surface treatment; TNCP; dielectrophoresis; thermoelectric nanowires;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969817
Filename
5969817
Link To Document