Title :
Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography
Author :
Wei, J. ; Gao, Y. ; Houtepen, A.J. ; Pandraud, G. ; Sarro, P.M.
Author_Institution :
DIMES, Delft Univ. of Technol., Delft, Netherlands
Abstract :
This paper presents photosensitive colloidal nanocrystal films for the integration of photon-detectors on 3D topography surfaces. Silicon wafers with anisotropically etched cavities are used as substrates, and gold electrodes are patterned across the 3D surface. A layer-by-layer dip-coating method is used to deposit semi-conductive PbSe colloidal nanocrystals from solution, in order to form infrared photon-detectors on the tapered surfaces. An integrated device capable of detecting the angle of the incoming infrared illumination is implemented to demonstrate the potential of this technology.
Keywords :
IV-VI semiconductors; colloidal crystals; dip coating; infrared detectors; lead compounds; nanostructured materials; silicon; 3D topography; PbSe; Si; infrared illumination; infrared photon-detectors; integrated device; layer-by-layer deposition; layer-by-layer dip-coating method; photosensitive colloidal semiconductor nanocrystal films; Detectors; Films; Lighting; Nanocrystals; Resistance; Substrates; Three dimensional displays; colloidal nanocrystal; infrared detection; layer-by-layer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969819