Title :
Large-surface-area 3D self-assembled nano-porous structure for high-sensitivity gas-sensing
Author :
Abasaki, M. ; Yamada, K. ; Souma, S. ; Moronuki, N. ; Sugiyama, M.
Author_Institution :
BEANS Project, Tokyo, Japan
Abstract :
Nano-porous structures are preferable for high-sensitive gas sensing, taking advantage of their extremely large surface-to-volume ratio. For this purpose, an inverse-opal structure of a gas-sensing material SnO2 has been fabricated between trench structures etched on a silicon wafer by utilizing the self-assembled close-packed polystyrene particles with dip coating. Performance was examined for the detection of methanol gas and sensitivity improvement was confirmed.
Keywords :
gas sensors; nanoparticles; polymers; self-assembly; tin compounds; 3D self assembled nanoporous structure; close packed polystyrene particles; dip coating; high sensitivity gas sensing; inverse opal structure; large surface area; methanol gas; sensitivity improvement; surface to volume ratio; Ethanol; Gas detectors; Immune system; Sensitivity; Substrates; Surface treatment; Suspensions; Self-assembly; gas sensor; nanoparticle;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969832
