Title :
Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes
Author :
Barnes, A.C. ; Roberts, R.C. ; Tien, N.C. ; Zorman, C.A. ; Feng, Philip X -L
Author_Institution :
Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
We report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q´s ~ 800-30000 at room temperature and in vacuum of ~20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects.
Keywords :
light interferometry; micromechanical resonators; nanoelectromechanical devices; silicon compounds; vibrational modes; wide band gap semiconductors; SiC; frequency 3 MHz to 30 MHz; nanomechanical resonator; nonlinear effect; optical interferometry; radiofrequency two port measurement; square membrane; temperature 293 K to 298 K; vibrational modes; Frequency measurement; Nanobioscience; Optical resonators; Q measurement; Resonant frequency; Silicon carbide; Voltage measurement; Membrane; Nanoelectromechanical Systems; Resonator; Silicon Carbide (SiC); Vibrational Modes;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969837
