Design and microfabrication of integrated magnetic MEMS energy harvester for low frequency application

An integrated vibration-to-electrical micro energy harvester based on electromagnetic methods was studied, targeting at low frequency application. The harvester was microfabricated without manual assembly of magnets and integrated into small size. The device developed special beams and magnet array for low frequency performance. Two types of harvester were fabricated with different magnet arrays and the magnetic field was investigated. The device volume is 5mm×5mm×1mm with a tested low resonant frequency as 64Hz. This magnetic harvester is suitable for bench fabricated by MEMS process and integrated with IC used in low frequency applications, such as micro implantable devices and portal devices.