Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester

This paper reports on the design, modelling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester with an elegant and robust process flow. The fabrication is based on a SOI wafer with self-aligned electrodes of the variable capacitor. The output current of the device shows distinct steps that are caused by strong lateral electrostatic forces. An electro-mechanical model was used to analyze and confirm the observed behaviour.