Biocompatible AlN-based piezo energy harvesters for implants

Author

Heidrich, N. ; Knöbber, F. ; Sah, R.E. ; Pletschen, W. ; Hampl, S. ; Cimalla, V. ; Lebedev, V.

Author_Institution

Fraunhofer Inst. for Appl. Solid State Phys., Freiburg, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

1642

Lastpage

1644

Abstract

In this work, we show that thin biocompatible AlN films reveal a stable, frequency independent piezoresponse demonstrating a good applicability for implantable micro-generators. It was demonstrated that although more power is generated by resonant (tensile stressed) systems, e.g. cantilevers and planar membranes, the non-resonant (compressive stressed) systems, e.g. corrugated membranes, are preferable for this purpose due to the generation of sufficient power at low-frequency aperiodic vibrations and at very low accelerations.

Keywords

aluminium compounds; bioMEMS; energy harvesting; piezoelectric devices; piezoelectric thin films; prosthetic power supplies; AlN; biocompatible based piezo energy harvester; cantilevers; implants; low-frequency aperiodic vibrations; microgenerators; planar membranes; Biomembranes; Electrical resistance measurement; Energy harvesting; Frequency measurement; Microstructure; Resonant frequency; Vibrations; AlN; piezoelectric energy harvesting; stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969854

Filename

5969854