Study of vibration-induced broadband flexible piezoelectric ZnO micro-harvester with storage system

Author

Pan, C.T. ; Liu, Z.H. ; Chen, Y.C. ; Chang, W.T. ; Chen, Y.J.

Author_Institution

Dept. of Mech. & Electro-Mech. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan

fYear

2011

fDate

5-9 June 2011

Firstpage

1669

Lastpage

1672

Abstract

The development of a flexible PET-based (polyethylene terephthalate; PET) vibrational energy harvesting system with broadband width was presented. That comprises of four sets of one single ZnO (zinc oxide) piezoelectric generator in the form of cantilever structure connected in parallel, and the rectifying circuit with storage module. The design of the cantilever structure was carried out by using commercial software ANSYS FEA (Finite Element Analysis). An optimal thickness of PET substrate is determined as 100μm. A single piezoelectric harvester consists of selectively deposited UV-curable resin lump structure. The result reveals that one single harvester achieves a maximum OCV (open-circuit voltage) up to 4V with power density of 1.247μW/cm². So far, we succeeded in accomplishing a broadband width system with operating frequency range from 100Hz to 450Hz to enhance powering efficiency.

Keywords

II-VI semiconductors; cantilevers; energy harvesting; finite element analysis; micromechanical devices; piezoelectric devices; vibrations; wide band gap semiconductors; zinc compounds; ANSYS FEA; ANSYS finite element analysis; PET-based vibrational energy harvesting; UV-curable resin lump structure; ZnO; cantilever structure; frequency 100 Hz to 450 Hz; piezoelectric generator; rectifying circuit; size 100 mum; storage system; vibration-induced broadband flexible piezoelectric micro-harvester; Broadband communication; Films; Generators; Positron emission tomography; Resonant frequency; Substrates; Zinc oxide; Broadband width; FEA; Flexible substrate; Optimum thickness of substrate; Rectification; Storage module; UV-curable resin; Vibrational energy harvester; ZnO;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969862

Filename

5969862