A review on medium term capacity planning for semiconductor wafer fabrication

This article surveys the medium term capacity planning methods for semiconductor wafer fabrication. The objectives of this article are to (1) identify the current research and fundamental methods for capacity planning, that is, spreadsheet, simulation, queueing model, linear programming and stochastic programming methods, and (2) take an in-depth look at the future research interest whether is it possible or not to combine the methods accepting uncertainty and those evaluating performance.