Microball bearing technology for MEMS devices and integrated microsystems

Author

Ghodssi, R. ; Hanrahan, B. ; Beyaz, M.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

1789

Lastpage

1794

Abstract

This paper presents a comprehensive review of microball bearing technology over the past eleven years. The design considerations and performance results of devices utilizing this type of microfabricated bearings are presented. Investigations on bearing tribology are also reported, specifically discussing the adhesion-dominated friction and wear regimes observed in rotary micromachines. As microsystem engineering progresses towards more heterogeneous and hybrid structures, microball bearing technology is expected to have a pivotal impact in broad transducing and packaging applications.

Keywords

adhesion; ball bearings; design engineering; friction; micromachining; micromechanical devices; wear; MEMS device; adhesion-dominated friction; bearing tribology; design consideration; heterogeneous structure; hybrid structure; integrated microsystem; microball bearing technology; microfabricated bearing; microsystem engineering; packaging application; rotary micromachine; Ball bearings; Fabrication; Friction; Micromotors; Rotors; Silicon; Microball bearing; Microsystems; Tribology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969887

Filename

5969887