• DocumentCode
    2541494
  • Title

    MEMS technology development and manufacturing in a CMOS foundry

  • Author

    Liu, CM ; Chou, Bruce C S ; Tsai, Robert Chin-Fu ; Shen, Nick Y M ; Chen, Benior SF ; Cheng, Emerson CW ; Tuan, Hsiao Chin ; Kalnitsky, Alex ; Cheng, Sean ; Lin, Chung-Hsien ; Chung, Tien-Kan ; Chang, Kuei-Sung ; Liu, Yi-Shao

  • Author_Institution
    Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    807
  • Lastpage
    810
  • Abstract
    MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
  • Keywords
    foundries; microsensors; CMOS foundry; MEMS manufacturing; MEMS technology development; TSMC-MEMS platform; motion sensors; Bonding; CMOS integrated circuits; Micromechanical devices; Plasmas; Sensors; Silicon; CMOS-MEMS; MEMS Foundry Service;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969891
  • Filename
    5969891
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2541494