New trends of MEMS/NEMS based on heterogeneous process integration - Towards life/green innovation -

Author

Fujita, Hiroyuki

Author_Institution

CIRMM, Univ. of Tokyo, Tokyo, Japan

fYear

2011

fDate

5-9 June 2011

Firstpage

1

Lastpage

6

Abstract

The technological revolution is essential for providing future innovation. With the saturation in the miniaturization of microelectronics as well as the maturity of MEMS, now further advance in MEMS/NEMS technology is required. Here, a heterogeneous integration technology combining various fabrication methods is proposed. We can utilize micromachining, VLSI technology, compound semiconductor technology, nano technology, bio technology, organic/inorganic chemistry, printing and molding to create a versatile manufacturing technology. Each technology offers the capability to realize specific functionality in different scales with different materials. This talk deals with the concept towards the heterogeneous integration of devices and functionality into micro/nano systems, the current development trend, and its potential contribution to life and green innovation.

Keywords

VLSI; micromechanical devices; nanoelectromechanical devices; MEMS/NEMS technology; VLSI technology; biotechnology; heterogeneous integration; heterogeneous process integration; life/green innovation; microelectronics; micromachining; miniaturization; molding; organic/inorganic chemistry; printing; semiconductor technology; technological revolution; Fabrication; Materials; Micromachining; Micromechanical devices; Nanobioscience; Nanoscale devices; Printing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969895

Filename

5969895