Title :
Analysis and modelling on CMOS spiral inductor with impact of metal dummy fills
Author :
Yong Wang ; Bo Chen ; Supeng Liu ; Liheng Lou ; Kai Tang ; Ying Zhang ; Yuanjin Zheng
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
This paper focuses on investigating and modelling the impact of dummy fills on the performance of CMOS spiral inductors. A modified π-Model is proposed to account the dummy effect. A spiral inductor is fabricated on 9-metal 65nm CMOS technology. Dummy effect is evaluated through comparisons on parameter values in equivalent circuit model. Experiment shows the modified π-Model provides proper characterization on the inductor with dummy fills.
Keywords :
CMOS integrated circuits; equivalent circuits; inductors; CMOS spiral inductor; dummy effect; equivalent circuit model; metal dummy fills; Capacitance; Inductors; Integrated circuit modeling; Metals; Semiconductor device modeling; Substrates; System-on-chip; S-parameter; Y-parameter; equivalent circuit model; oxide capacitance; substrate;
Conference_Titel :
Integrated Circuits (ISIC), 2014 14th International Symposium on
Conference_Location :
Singapore
DOI :
10.1109/ISICIR.2014.7029509
