Title :
Initial Design Of A 1 Megawatt Average, 150 Kilovolt Pulse Modulator For An Industrial Plasma Source Ion Implantation Processor
Author :
Reass, William A. ; Deb, Dipten
Author_Institution :
Los Alamos National Lab
Keywords :
Manufacturing; Oil insulation; Optical fiber cables; Plasma accelerators; Plasma chemistry; Plasma density; Plasma sources; Pulse modulation; Surface resistance; Switches;
Conference_Titel :
Power Modulator Symposium, 1994., Twenty-First International
DOI :
10.1109/MODSYM.1994.597028
