DocumentCode
2545791
Title
Crossatron Modulator Designs And Performance For Plasma-based Ion Implantation Systems
Author
Goebel, Dan M. ; Reass, William A.
Author_Institution
Hughes Research Laboratories
fYear
1994
fDate
27-30 Jun 1994
Firstpage
13
Lastpage
16
Keywords
Anodes; Apertures; Cathodes; Ion implantation; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Pulse modulation; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 1994., Twenty-First International
ISSN
1076-8467
Type
conf
DOI
10.1109/MODSYM.1994.597029
Filename
597029
Link To Document