Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave

Author

Nordin, Anis Nurashikin ; Zaghloul, Mona

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., WA

fYear

2006

fDate

21-24 May 2006

Abstract

The design and fabrication of an integrated 1GHz surface acoustic wave (SAW) resonator is described in this paper. The SAW resonator was fabricated using a combination of CMOS plus surface micromachining techniques. Utilizing the minimum feature size of the available 0.6 micron AMI CMOS process, the periodic distance of the interdigitated fingers of the SAW resonator was designed to create an ultra high frequency resonator of 1.15 GHz. Measurements and characterization of the fabricated resonator were performed and used as a basis to develop a two-port equivalent circuit model. To complement the resonator, a Pierce oscillator circuit was designed in CMOS to create a frequency synthesizer capable of generating frequencies up to 1.15GHz without the complexity of a phase-locked-loop (PLL) circuit

Keywords

CMOS integrated circuits; UHF oscillators; equivalent circuits; integrated circuit design; microwave devices; surface acoustic wave resonators; 0.6 micron; 1 GHz; 1.5 GHz; CMOS process; CMOS resonator; Pierce oscillator circuit; frequency synthesizer; interdigitated fingers; surface acoustic wave resonator; surface micromachining; two-port equivalent circuit model; Acoustic waves; Ambient intelligence; CMOS process; Circuits; Fabrication; Fingers; Frequency synthesizers; Micromachining; Phase locked loops; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2006. ISCAS 2006. Proceedings. 2006 IEEE International Symposium on

Conference_Location

Island of Kos

Print_ISBN

0-7803-9389-9

Type

conf

DOI

10.1109/ISCAS.2006.1693384

Filename

1693384