Laser micromachining of polymer waveguides for low cost passive alignment to VCSELs

Author

Rowlette, John R. ; Kallen, Michael Kadar ; Stack, Jared ; Lewis, Warren

Author_Institution

Global Optoelectron., AMP Inc., Harrisburg, PA, USA

Volume

2

fYear

1996

fDate

18-21 Nov. 1996

Abstract

We developed a statistical model of the passive alignment process. This model allows us to calculate the distribution of VCSEL to waveguide alignment tolerances for laser micromachining of the waveguide and pedestal alignment features. Using this distribution as input for the optical model, the distribution of optical coupling efficiencies for the packaging tolerances was calculated. The coupling efficiencies for the passively aligned waveguides to the VCSEL array sources were measured and compared to the simulation results.

Keywords

laser beam machining; laser cavity resonators; micromachining; optical planar waveguides; optical polymers; optical workshop techniques; semiconductor device packaging; semiconductor laser arrays; semiconductor lasers; statistical analysis; surface emitting lasers; VCSEL array sources; VCSELs; coupling efficiencies; laser micromachining; low cost passive alignment; optical coupling efficiencies; optical model; packaging tolerances; passively aligned waveguides; pedestal alignment features; polymer waveguides; simulation results; statistical model; waveguide alignment tolerances; Costs; Micromachining; Optical waveguides; Packaging; Planar waveguides; Polymers; Predictive models; Surface emitting lasers; Vertical cavity surface emitting lasers; Waveguide lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-3160-5

Type

conf

DOI

10.1109/LEOS.1996.571605

Filename

571605