• DocumentCode
    2549139
  • Title

    Investigations of structural and electronic properties of TiO2-doped layers deposited by hot target reactive magnetron sputtering method

  • Author

    Prociow, E. ; Domaradzki, J. ; Kaczmarck, D.

  • Author_Institution
    Fac. of Microsystem Electron. & Photonics, Wroclaw Univ. of Technol., Poland
  • fYear
    2002
  • fDate
    14-16 Oct. 2002
  • Firstpage
    51
  • Lastpage
    54
  • Abstract
    In the paper structural and thermoelectrical properties of titanium oxides with palladium and gold dopants has been described The thermoelectric effect in the specimen doped by palladium has been found. Growing and nucleation of titanium films during deposition has been also discussed.
  • Keywords
    crystal structure; gold; nucleation; palladium; semiconductor growth; semiconductor thin films; sputtered coatings; thermoelectricity; titanium compounds; transparency; TiO2-doped layers; TiO2:Au; TiO2:Pd; electronic properties; hot target reactive magnetron sputtering method; nucleation; structural properties; thermoelectrical properties; Atmosphere; Crystallization; Diffraction; Gold; Magnetic properties; Optical films; Plasma temperature; Pulsed power supplies; Sputtering; Thermoelectricity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
  • Print_ISBN
    0-7803-7276-X
  • Type

    conf

  • DOI
    10.1109/ASDAM.2002.1088472
  • Filename
    1088472
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2549139