DocumentCode :
2549564
Title :
Parameter extraction for tunable TFBARs based on BaxSr1−xTiO3
Author :
Norling, Martin ; Berge, John ; Gevorgian, Spartak
Author_Institution :
Phys. Electron. Lab., Chalmers Univ. of Technol., Goteborg, Sweden
fYear :
2009
fDate :
7-12 June 2009
Firstpage :
101
Lastpage :
104
Abstract :
A model and a robust extraction procedure for tunable thin-film bulk acoustic resonators (TFBARs) are proposed. The TFBARs are based on induced piezoelectricity in BaxSr1-xTiO3 films. Their tunable characteristics as represented by the extracted model parameters are interpreted and discussed.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal resonators; BaxSr1-xTiO3; induced piezoelectricity; tunable TFBAR; tunable thin film bulk acoustic resonator; Dielectric losses; Electrodes; Ferroelectric films; Film bulk acoustic resonators; Gold; Optical films; Parameter extraction; Piezoelectric films; Piezoelectricity; Tunable circuits and devices; Model extraction; ferroelectric; piezoelectric; tunable TFBAR; tunable thin-film bulk acoustic resonator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
Conference_Location :
Boston, MA
ISSN :
0149-645X
Print_ISBN :
978-1-4244-2803-8
Electronic_ISBN :
0149-645X
Type :
conf
DOI :
10.1109/MWSYM.2009.5165642
Filename :
5165642
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2549564
بازگشت