Title :
Stimulation of diamond growth on optically transparent non-conductive substrates
Author :
Kadlecikova, M. ; Breza, J. ; Vesely, M. ; Luptakova, V. ; Balon, F. ; Vojackova, A. ; Kral, J. ; Janik, J. ; Kromka, A.
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.
Keywords :
Raman spectra; chemical vapour deposition; diamond; elemental semiconductors; semiconductor growth; semiconductor thin films; AC biasing; Al2O3; C; Raman spectroscopy; diamond grain seeding; diamond layers; glass substrates; hot filament CVD; optically transparent nonconductive substrates; sapphire substrates; Atomic layer deposition; Atomic measurements; Chemical vapor deposition; Hydrogen; Optical films; Plasma temperature; Powders; Rough surfaces; Stimulated emission; Surface roughness;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
Print_ISBN :
0-7803-7276-X
DOI :
10.1109/ASDAM.2002.1088515
