Title : 
Coplanar waveguide modeling based on scattering parameter measurements
         
        
            Author : 
Klasovitý, M. ; Tomáa, M.
         
        
            Author_Institution : 
Fac. of Electr. Eng. & Inf. Technol., Slovak Univ. of Technol., Bratislava, Slovakia
         
        
        
        
        
        
            Abstract : 
Presents a method for verification of important coplanar waveguide parameters. It employs a simplex optimization algorithm for transmission line model identification from on-wafer S-parameter measurements in a wide frequency range. The method was implemented in a control program for automated S-parameter measurements and applied for characterization of micromachined AlGaAs and InGaP coplanar waveguides.
         
        
            Keywords : 
III-V semiconductors; aluminium compounds; coplanar transmission lines; coplanar waveguides; gallium arsenide; gallium compounds; indium compounds; optimisation; waveguide theory; coplanar waveguide parameters; micromachined waveguides; on-wafer S-parameter measurements; simplex optimization algorithm; transmission line model; Circuits; Coplanar waveguides; Dielectric losses; Impedance; Microelectronics; Power transmission lines; Propagation constant; Reflection; Scattering parameters; Transmission line measurements;
         
        
        
        
            Conference_Titel : 
Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
         
        
            Print_ISBN : 
0-7803-7276-X
         
        
        
            DOI : 
10.1109/ASDAM.2002.1088516