• DocumentCode
    2550247
  • Title

    Interfacing chemistry with microdevices: Potential and challenges of chemical microsensors

  • Author

    Mizaikoff, Boris ; Kranz, Christine

  • Author_Institution
    Sch. of Chem. & Biochem., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2002
  • fDate
    14-16 Oct. 2002
  • Firstpage
    307
  • Lastpage
    316
  • Abstract
    Recent advances in micro- and nanotechnology determine current trends in the field of chemical sensor technology enabling micro- and nanofabrication of device components and entire sensing systems. However, not all properties of chemical sensing systems necessarily improve with decreasing physical dimensions. Challenges of applying chemical sensors in a real-world environment are discussed and implicit consequences for scaling down chemical sensing systems to the micro- and nanoscale are derived. General aspects of miniaturized chemical sensor technology is contrasted with selected examples elucidating trends in the field of mid-infrared optical sensors and scanning probe tip integrated electrochemical sensing devices.
  • Keywords
    chemical sensors; electrochemical sensors; microsensors; nanotechnology; optical sensors; reviews; chemical microsensors; chemical sensor technology; chemistry; microdevices; mid-infrared optical sensors; miniaturized chemical sensor technology; nanofabrication; nanoscale; nanotechnology; physical dimensions; scanning probe tip integrated electrochemical sensing devices; Biochemical analysis; Biosensors; Chemical analysis; Chemical and biological sensors; Chemical sensors; Chemical technology; Chemistry; Microsensors; Optical sensors; Sensor arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
  • Print_ISBN
    0-7803-7276-X
  • Type

    conf

  • DOI
    10.1109/ASDAM.2002.1088531
  • Filename
    1088531