Title :
Thin films for electrochemical sensoric interfaces
Author :
Jakubec, A. ; Rehacek, V. ; Novotny, I. ; Ivanic, R. ; Tvarozek, V. ; Knedlik, Ch ; Breternitz, V. ; Spiess, L.
Author_Institution :
Dept. of Microelectron., Slovak Tech. Univ., Bratislava, Slovakia
Abstract :
Planar microelectrochemical chips with thin-film electrodes (Au, Pt, Ag/AgCl) of different shapes and arrangements (compact, interdigitated array) on Si or glass substrates have been developed and fabricated Analyses of thin film roughness and surface morphology, by AFM and cyclic voltammetry have been performed. Resulting from this we found an optimal cleaning procedure of microelectrodes. The control and analysis of biosensing interfaces play a significant role in the design of biosensors and in optimization of their properties.
Keywords :
atomic force microscopy; biosensors; electrochemical electrodes; electrochemical sensors; gold; metallic thin films; microelectrodes; microsensors; platinum; silver; silver compounds; surface cleaning; surface morphology; surface topography; voltammetry (chemical analysis); AFM; Ag-AgCl; Au; Pt; Si; biosensing interfaces; biosensors; cleaning procedure; cyclic voltammetry; electrochemical sensoric interfaces; glass substrates; interdigitated array; microelectrodes; optimization; planar microelectrochemical chips; surface morphology; thin film roughness; thin films; thin-film electrodes; Biosensors; Electrodes; Glass; Gold; Performance analysis; Rough surfaces; Semiconductor thin films; Shape; Substrates; Thin film sensors;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
Print_ISBN :
0-7803-7276-X
DOI :
10.1109/ASDAM.2002.1088533
