Novel RF devices with multiple capacitively-coupled electrodes

We present operation concepts and performance characteristics of novel microwave devices and structures using Oxide-AlGaN/GaN Heterostructures with multiple capacitively-coupled contacts (C³). The C³ electrodes do not require annealing and, hence, such devices with tight electrode spacing can be fabricated using a self-aligned process. To illustrate the advantages of C³ - technology, we demonstrate multi-gate C³- RF switches, RF switches with side control electrodes and novel RF-TLM test structures for layer and contact parameter extraction.