Title :
Real 3D electro-thermal simulation and analysis for ESD protection structures
Author :
Xie, Haolu ; Zhan, Rouying ; Wang, Albert ; Gafiteanu, Roman
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Inst. of Technol., Chicago, IL, USA
Abstract :
This paper presents a three-dimensional electro-thermal analysis for ESD (electrostatic discharge) protection structures, aiming for accurately predicting ESD electro-thermal failure threshold and better understanding ESD protection device thermal resistance. An accurate 3D electro-thermal analysis method using real 3D TCAD simulation as presented in Taurus-process user guide (2003) and Taurus-device user guide (2003) was developed. 3D simulation was compared with experimental data using transmission line pulse (TLP) measurements for characterizing ESD protection devices. Accurate electro-thermal analysis is essential to understanding thermal behaviors of ESD protection structures under high-current stressing.
Keywords :
circuit simulation; electrostatic discharge; technology CAD (electronics); thermal analysis; transmission line theory; 3D TCAD simulation; 3D electro-thermal simulation; ESD protection structures; device thermal resistance; electro-thermal failure threshold; electrostatic discharge; high-current stressing; transmission line pulse measurements; Analytical models; Electrical resistance measurement; Electrostatic analysis; Electrostatic discharge; Failure analysis; Protection; Pulse measurements; Thermal resistance; Thermal stresses; Transmission line measurements;
Conference_Titel :
Devices, Circuits and Systems, 2004. Proceedings of the Fifth IEEE International Caracas Conference on
Print_ISBN :
0-7803-8777-5
DOI :
10.1109/ICCDCS.2004.1393354