Simulation of a small feature gauging system using phase-shift projection moiré topography

Although phase-shift moiré topography is considered as a promising technique for the three dimension measurement and inspection of the parts of small feature size in industry, it has not been widely put into practice because designing such a system to meet the specific inspection task requirements could be difficult. In this paper, a scheme of a small feature gauging system based on phase-shift moiré topography is proposed and its mathematical model is deduced. A simulation design package is also developed to determine the feasible range of the design parameters according to the design requirements as well as to evaluate the system performance. The simulation results verify the mathematical model of this gauging system and show that the design process of the small feature gauging system can be greatly simplified with this simulation package.