Title :
Design and test of MEMS
Author :
Courtois, B. ; Karam, J.M. ; Mir, S. ; Lubaszewski, M. ; Székely, V. ; Rencz, M. ; Hofmann, K. ; Glesner, M.
Author_Institution :
TIMA Lab., Grenoble, France
Abstract :
This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues
Keywords :
industrial property; micromechanical devices; semiconductor device testing; technology CAD (electronics); CAD environment; CAD frameworks; MEMS; intellectual property; microelectromechanical systems; open research areas; testing; Circuit testing; Design automation; Mechanical systems; Microelectromechanical systems; Microelectronics; Micromechanical devices; Productivity; Read only memory; Rivers; System testing;
Conference_Titel :
VLSI Design, 1999. Proceedings. Twelfth International Conference On
Conference_Location :
Goa
Print_ISBN :
0-7695-0013-7
DOI :
10.1109/ICVD.1999.745160
