Precision control of a new servo pneumatic table

In the paper, a new construction of the pneumatic actuator, instead of conventional cylinder the flexible diaphragm is applied to seal the two different chambers of the cylinder, is designed to decrease its friction force. It means that it´s suitable to be applied for the precise motion control due to the low friction force. Besides, a hybrid fuzzy controller including dead-zone and the velocity compensators is proposed for the precise position control of the pneumatic servo table in this paper. The range of the dead-zone is modified in real time by the designed compensator. And, the velocity feedback compensation is designed to simulate the damping force of the system, so that the oscillation phenomenon of the system can be improved. From the experimental results, the steady state error of the table can reach the nanometer level under different loadings in the study.