Fabrication and characterization of glass-based MEMS transformer with single layer coil structure

Author

Yunas, Jumril ; Majlis, Burhanuddin Yeop

Author_Institution

Inst. of Microengineering & Nanoelectron., Univ. Kebangsaan Malaysia, Bangi

fYear

2008

fDate

25-27 Nov. 2008

Firstpage

221

Lastpage

226

Abstract

A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICpsilas applications.

Keywords

Q-factor; micromachining; micromechanical devices; transformers; Q-factor; frequency 580 MHz; frequency 720 MHz; gain 4.1 dB; glass based MEMS transformer; high resistive glass substrate; resonance frequency; single layer coil structure; square interwinding coil geometry; surface micromachining; Coils; Fabrication; Frequency; Geometry; Glass; Insertion loss; Micromachining; Micromechanical devices; Q factor; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2008. ICSE 2008. IEEE International Conference on

Conference_Location

Johor Bahru

Print_ISBN

978-1-4244-3873-0

Electronic_ISBN

978-1-4244-2561-7

Type

conf

DOI

10.1109/SMELEC.2008.4770312

Filename

4770312