Influence of kinetic effects on the resonance behavior of the impedance probe

Summary form only given. Active plasma resonance spectroscopy is a well known diagnostic method. Many concepts of this method are theoretically investigated and realized as a diagnostic tool. One of these tools is the impedance probe (IP), which is investigated by D.N. Walker et al.¹. The application of such a probe in plasmas with pressures of only a few Pa raises the question whether kinetic effects have to be taken into account or not. To address this question a kinetic model is necessary.