3-D modeling of Dielectric Barrier Discharge at low pressure Argon gas

Summary form only given. Dielectric Barrier Discharges are characterized by the presence of at least one dielectric layer between metal electrodes in discharge space and have been used extensively from ozone generation to plasma display panels1–3. In this paper the 3-D fluid model coupled with Poisson equation and boundary conditions is proposed to study of DBD at different low pressures of Argon gas under an Ac Sinusoidal voltage. Numerical calculations time dependant 3-D fluid model are performed precisely at various discharge conditions to calculate electrical characteristics and plasma parameters. The discharge behaviors are studied by varying external parameters such as the amplitude and frequency of external voltage and properties of dielectric barrier materials. Figure below shows a typical behavior of the time dependent of the current and applied voltage at 7-kHz and 350 V in 400 Pa in z direction. We have also investigated the electrical characteristics and behaviors of the discharge and the effect of dielectric thickness and electrode shape on spatial and temporal distribution of electrons, ions and excited particles. The evolution of ions and electrons densities in time and space are also presented.