Title :
Phenomenological description of a symmetry breaking rotating instability in HPPMS discharges
Author :
Gallian, Sara ; Eremin, Denis ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter ; Hecimovic, Ante ; de los Arcos, Teresa ; Schulz-von der Gathen, Volker ; Boke, Marc ; Winter, Jorg ; Hitchon, William N.G.
Author_Institution :
Ruhr University Bochum, D-44780, Germany
Abstract :
Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a recently developed Ionized Physical Vapor Deposition (IPVD) technique. A bias voltage is applied to the target for a few hundred microseconds with a frequency of a few hundreds of Hertz, delivering several kW cm−2 of power to the target. This results in the production of an ultra dense plasma with a high ionization degree, showing some peculiar behaviors.
Keywords :
Chemical vapor deposition; Discharges (electric); Educational institutions; Equations; Plasmas; Sputtering;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383360
