A micromachined contacting sliding short for high frequency applications

As science probes into the Terahertz region (THz), there is a need for more precise micromachining techniques to fabricate structures such as rectangular waveguides. Additionally, as wavelength decreases there is a greater need for fine tuning of these devices to maximize the amplitude and adequately change the phase of the signal. The concept presented in this article builds on previous sliding backshort designs and integrates them with lithographic micromachining techniques to increase the flexibility of conventional rectangular waveguides for sub-millimeter waves.