Microplasma and VUV-photoionization gas analyzers based on collisional electron spectroscopy (CES)

Summary form only given. Traditional electron spectroscopy (ES) is one of the most informative means for chemical structure analysis of the matter¹. According to ES, identification of atoms and molecules is carried out by the energy analysis of characteristic electrons formed in ionization process of atoms or molecules A during collisions with particles B* of definite energy (photons, excited atoms, etc.)