Title :
The influence of interaction microwave radiation with plasman on the technological parametrs of plasma manufacture
Author :
Nefedov, D.V. ; Yafarov, R.K.
Keywords :
Equations; Manufacturing processes; Microwave technology; Plasma materials processing; Sprites (computer); Vacuum technology;
Conference_Titel :
Actual Problems of Electron Devices Engineering, 2004. APEDE 2004. International Conference on
Print_ISBN :
0-7803-8442-3
DOI :
10.1109/APEDE.2004.1393585
