Studies on the electrical characteristics of a radio-frequency atmospheric-pressure plasma jet array

Summary form only given. With the unique features of low gas temperatures, low breakdown/discharge voltages and high concentrations of chemically reactive species, radio-frequency, atmospheric-pressure glow discharge (RF APGD) plasmas produced using a water-cooled bare-metallic electrode plasma generator configuration have been used widely in the fields of plasma-based etching, deposition, disinfection/sterilization of heat-sensitive medical instruments, gene mutation breeding of microbes, etc.^1,2. For promoting actual applications of the RF APGDs, it is an issue to produce the large-area and uniform glow discharge plasma jets so as to obtain the high treatment efficiency.