Title :
High-Q RF-MEMS tunable evanescent-mode cavity filter
Author :
Park, Sang-June ; Reines, Isak ; Rebeiz, Gabriel
Author_Institution :
Qualcomm Inc., San Diego, CA, USA
Abstract :
This paper presents a high-Q tunable evanescent-mode cavity filter using capacitive RF MEMS cantilever switches with a frequency coverage of 5.5-4.3 GHz. The filter results in an insertion loss of 2.6-5.3 dB over the tuning range and a 3-dB bandwidth of 55-40 MHz (fractional bandwidth of %1). The measured Qu of the filter is 511-273 over the frequency range, which is to our knowledge, the best report Q using RF-MEMS technology.
Keywords :
cavity resonator filters; microswitches; microwave devices; RF-MEMS; cantilever switches; tunable evanescent-mode cavity filter; Bandwidth; Capacitance; Cavity resonators; Coupling circuits; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Resonator filters; Switches; Tunable circuits and devices; Capacitive cantilever switch; RF MEMS; evanescent-mode; high-Q tunable filter; waveguide filter;
Conference_Titel :
Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-2803-8
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2009.5165904
