Title :
Cascadable RF MEMS switched capacitors for 0.1–2 GHz applications
Author :
Reines, Isak ; Rebeiz, Gabriel M.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of California, San Diego, CA, USA
Abstract :
This paper presents an RF MEMS switched-capacitor suitable for VHF and UHF tunable filters and reconfigurable matching networks. The device is based on a symmetric circular beam geometry that results in low-series-inductance compact device arrays for high-value capacitances. Device arrays are shown with down-state capacitances ranging from 11.22 to 17.49 pF, with associated impedances of 144-7 Omega and 91-4 Omega at 100-2000 MHz. The impedances vary with frequency as 1/omega over a 20:1 frequency range. The measured Q is greater than 50 in the VHF range.
Keywords :
UHF filters; VHF filters; capacitors; cascade networks; circuit tuning; microswitches; UHF tunable filters; VHF tunable filters; capacitance 11.22 pF to 17.49 pF; cascadable RF MEMS switched capacitors; frequency 0.1 GHz to 2 GHz; low-series-inductance compact device arrays; reconfigurable matching networks; symmetric circular beam geometry; Capacitance; Electrodes; Geometry; Impedance; Matched filters; Radiofrequency microelectromechanical systems; Residual stresses; Switched capacitor networks; Switches; Voltage; RF MEMS; reconfigurable network; tunable capacitors; tunable filters;
Conference_Titel :
Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-2803-8
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2009.5165907
