Title :
The development of a MEMS six-port reflectometer calibration standard
Author :
Reck, Theodore J. ; Weikle, Robert M. ; Barker, N. Scott
Author_Institution :
Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA
Abstract :
This research investigates electrically actuated microelectromechanical standards for the calibration of a six-port reflectometer. The effects of a non-ideal standard are studied with a computer model and the results show nominal operation by constraining the amplitude variation of the reflection coefficient of the sliding short below 0.03. A W-band (75-110 GHz) distributed MEMS transmission line (DMTL) variable phase shifter satisfying this constraint is designed and fabricated. Measurements show sufficient phase shift for a calibration but the amplitude variation is slightly above the ideal value found by the computer model.
Keywords :
calibration; micromechanical devices; phase shifters; reflectometers; transmission lines; MEMS six-port reflectometer calibration standard; W-band distributed MEMS transmission line; amplitude variation; electrically actuated microelectromechanical standard; reflection coefficient; variable phase shifter; Calibration; Extraterrestrial measurements; Frequency; Instruments; Micromechanical devices; Phase shifters; Reflection; Standards development; Voltmeters; Wavelength measurement; DMTL; RF-MEMS; Six-port reflectometer; calibration; phase shifter;
Conference_Titel :
Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-2803-8
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2009.5165946
