Title :
An efficient method for substrate impedance extraction
Author :
Wang, Q. ; Van Der Meijs, N.P.
Keywords :
Analog integrated circuits; Capacitance; Circuit simulation; Conductivity; Dielectric substrates; Digital integrated circuits; Frequency dependence; Impedance; Silicon; Surface treatment;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1542933
