Title :
Integration of high-Q resonators with MCM-D for millimeter wave applications
Author :
Ocket, I. ; Nauwelaers, B. ; Carchon, G. ; De Raedt, W.
Keywords :
Automotive engineering; Cavity resonators; Copper; Costs; Feeds; Microwave technology; Millimeter wave radar; Millimeter wave technology; Silicon; Wet etching;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1542942
