DocumentCode

2557031

Title

Oxides - Ultra Thin Oxides

Author

Vollertsen, Rolf-Peter ; Dumin, Dave J.

fYear

1998

fDate

15-15 Oct. 1998

Firstpage

92

Lastpage

93

Keywords

Acceleration; Assembly; Electric breakdown; Internet; Manufacturing; Microelectronics; Rivers; Time measurement; Voltage; Voting;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop Final Report, 1998. IEEE International

Conference_Location

Lake Tahoe, CA, USA

Print_ISBN

0-7803-4881-8

Type

conf

DOI

10.1109/IRWS.1998.745376

Filename

745376