Title :
C-V Measurements - And Its Implication On Oxide, Transistor And Non-volatile Memory Cell Reliability
Author :
Schwalke, Udo ; Gordon, Bart
Keywords :
Capacitance-voltage characteristics; Current measurement; Doping; Frequency measurement; Nonvolatile memory; Quantum capacitance; Testing; Thickness measurement; Time measurement; Voltage;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1998. IEEE International
Conference_Location :
Lake Tahoe, CA, USA
Print_ISBN :
0-7803-4881-8
DOI :
10.1109/IRWS.1998.745378